JPH0357416Y2 - - Google Patents

Info

Publication number
JPH0357416Y2
JPH0357416Y2 JP1985010192U JP1019285U JPH0357416Y2 JP H0357416 Y2 JPH0357416 Y2 JP H0357416Y2 JP 1985010192 U JP1985010192 U JP 1985010192U JP 1019285 U JP1019285 U JP 1019285U JP H0357416 Y2 JPH0357416 Y2 JP H0357416Y2
Authority
JP
Japan
Prior art keywords
head
horn head
shank bar
drive shaft
push rod
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985010192U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61127961U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985010192U priority Critical patent/JPH0357416Y2/ja
Publication of JPS61127961U publication Critical patent/JPS61127961U/ja
Application granted granted Critical
Publication of JPH0357416Y2 publication Critical patent/JPH0357416Y2/ja
Expired legal-status Critical Current

Links

JP1985010192U 1985-01-28 1985-01-28 Expired JPH0357416Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985010192U JPH0357416Y2 (en]) 1985-01-28 1985-01-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985010192U JPH0357416Y2 (en]) 1985-01-28 1985-01-28

Publications (2)

Publication Number Publication Date
JPS61127961U JPS61127961U (en]) 1986-08-11
JPH0357416Y2 true JPH0357416Y2 (en]) 1991-12-27

Family

ID=30491144

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985010192U Expired JPH0357416Y2 (en]) 1985-01-28 1985-01-28

Country Status (1)

Country Link
JP (1) JPH0357416Y2 (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009141349A (ja) * 2007-12-06 2009-06-25 Asml Netherlands Bv 音響共振器を有するリソグラフィ装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5877444A (ja) * 1981-11-04 1983-05-10 Mitsutoyo Mfg Co Ltd 内面研削機

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009141349A (ja) * 2007-12-06 2009-06-25 Asml Netherlands Bv 音響共振器を有するリソグラフィ装置

Also Published As

Publication number Publication date
JPS61127961U (en]) 1986-08-11

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